A high-throughput search for electronic materials-thin-film dielectrics

R. B. Van Dover, L. F. Schneemeyer, R. M. Fleming, H. A. Huggins

Research output: Contribution to journalArticle

21 Scopus citations

Abstract

Parallel synthesis together with high-throughput screening was used to identify candidate materials for integrated circuit applications that demand a superior high permittivity dielectric thin film. Specifically, we developed a 'continuous-composition spread' (CCS) technique to synthesize much of a pseudoternary oxide system in a single deposition and used this in conjunction with a high-throughput measurement protocol, thereby allowing each chemical system to be deposited and evaluated in about 24 h. This approach led to the identification of compositions in the Zr-Sn-Ti-O system with promising properties. The same technique was used to determine the optimum compositions as a function of processing parameters. Films with the composition Zr.2Sn.2Ti.6O2 were then prepared using a conventional synthetic technique (on-axis sputtering) and were verified to have excellent properties. Thus, the CCS technique has demonstrated utility in rapidly identifying and developing a useful new material.

Original languageEnglish
Pages (from-to)217-225
Number of pages9
JournalBiotechnology and Bioengineering
Volume61
Issue number4
DOIs
StatePublished - 1 Jan 1999

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Keywords

  • Dielectric
  • Electronic
  • Film
  • Insulator

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