A high-throughput search for electronic materials-thin-film dielectrics

Keyphrases

• Continuous Composition Spread 100%
• Dielectric Thin Films 100%
• Electronic Materials 100%
• High-throughput Search 100%
• Ti-O 50%
• High Permittivity Dielectrics 50%
• Processing Parameters 50%
• On-axis Sputtering 50%
• Parallel Synthesis 50%
• High-throughput Measurement 50%
• Measurement Protocol 50%
• Circuit Application 50%
• Integrated Circuits 50%
• Chemical System 50%
• Oxide Systems 50%
• High-throughput Screening 50%
• Pseudoternary 50%
• Optimum Composition 50%
• Synthetic Techniques 50%

Material Science

• Thin Films 100%
• Dielectric Films 100%
• Electronic Material 100%
• Phase Composition 100%
• Oxide Compound 20%
• Electronic Circuit 20%
• Permittivity 20%

Chemical Engineering

• Film 100%