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Advanced amorphous dielectrics for embedded capacitors
G. B. Alers, R. B. van Dover, L. F. Schneemeyer, L. Stirling, C. Y. Sung, P. W. Diodato, R. Liu, Y. H. Wong, R. M. Fleming, D. V. Lang, J. P. Chang
Research output: Contribution to journal › Conference article › peer-review
10
Scopus
citations