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Advanced amorphous dielectrics for embedded capacitors

  • G. B. Alers
  • , R. B. van Dover
  • , L. F. Schneemeyer
  • , L. Stirling
  • , C. Y. Sung
  • , P. W. Diodato
  • , R. Liu
  • , Y. H. Wong
  • , R. M. Fleming
  • , D. V. Lang
  • , J. P. Chang

Research output: Contribution to journalConference articlepeer-review

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Material Science