Composition-dependent crystallization of alternative gate dielectrics

R. B. Van Dover, M. L. Green, L. Manchanda, L. F. Schneemeyer, T. Siegrist

Research output: Contribution to journalArticlepeer-review

21 Scopus citations

Fingerprint

Dive into the research topics of 'Composition-dependent crystallization of alternative gate dielectrics'. Together they form a unique fingerprint.

Keyphrases

Engineering

Material Science

Pharmacology, Toxicology and Pharmaceutical Science

Chemical Engineering