Keyphrases
Dielectric Response
100%
Tantalum Oxide
100%
Sputter Deposition
100%
Ion Bombardment
100%
Off-axis Substrates
75%
Substrate Bias
75%
Reactive Sputtering
50%
Frequency Dependence
25%
Good Quality
25%
Dielectric Constant
25%
Columnar
25%
Void Structure
25%
Dielectric Film
25%
Capacitive Measurement
25%
Maxwell-Wagner
25%
O2 Flux
25%
Substrate Negative Bias
25%
Dielectric Behavior
25%
Loss Tangent
25%
Tantalum Oxide Thin Films
25%
Ta2O5
25%
Ion Density
25%
Frequency Loss
25%
Material Science
Tantalum Oxides
100%
Sputter Deposition
100%
Dielectric Material
100%
Ion Bombardment
100%
Film
50%
Density
25%
Thin Films
25%
Permittivity
25%
Dielectric Films
25%
Film Growth
25%
Engineering
Dielectrics
100%
Ion Implantation
100%
Substrate Bias
60%
Reactive Sputtering
40%
Thin Films
20%
Growing Film
20%
Sputter Gun
20%
Ion Density
20%
Capacitive
20%
Loss Tangent
20%
Dielectric Films
20%