Micro-transformer devices using thin-film electroplated deposition

Ashraf Lotfi, R. Bruce Van Dover, Lynn Schneemeyer, Michael Steigerwald

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

13 Scopus citations

Abstract

We report our results fabricating micro-magnetic devices using our 20 μm photolithographic process. In this technique, magnetic devices in silicon ICs use magnetic thin-films deposited by electroplating. The magnetic and electrical characteristics of fabricated micro-transformers are measured and reported. Tests show proper operation over high-voltage isolation boundaries. Future uses for these devices will be in micro-power converters for mobile applications.

Original languageEnglish
Title of host publicationPESC Record - IEEE Annual Power Electronics Specialists Conference
Editors Anon
Pages1511-1515
Number of pages5
DOIs
StatePublished - 1 Jan 1998
EventProceedings of the 1998 IEEE 29th Annual Power Electronics Specialists Conference, PESC. Part 2 (of 2) - Fukuoka, Jpn
Duration: 18 May 199821 May 1998

Publication series

NamePESC Record - IEEE Annual Power Electronics Specialists Conference
Volume2
ISSN (Print)0275-9306

Other

OtherProceedings of the 1998 IEEE 29th Annual Power Electronics Specialists Conference, PESC. Part 2 (of 2)
CityFukuoka, Jpn
Period18/05/9821/05/98

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