Micro-transformer devices using thin-film electroplated deposition

Ashraf Lotfi; R. Bruce Van Dover; Lynn Schneemeyer; Michael Steigerwald

doi:10.1109/PESC.1998.703269

Micro-transformer devices using thin-film electroplated deposition

Ashraf Lotfi, R. Bruce Van Dover, Lynn Schneemeyer, Michael Steigerwald

Chemistry and Biochemistry

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

15 Scopus citations

Abstract

We report our results fabricating micro-magnetic devices using our 20 μm photolithographic process. In this technique, magnetic devices in silicon ICs use magnetic thin-films deposited by electroplating. The magnetic and electrical characteristics of fabricated micro-transformers are measured and reported. Tests show proper operation over high-voltage isolation boundaries. Future uses for these devices will be in micro-power converters for mobile applications.

Original language	English
Title of host publication	PESC Record - IEEE Annual Power Electronics Specialists Conference
Editors	Anon
Pages	1511-1515
Number of pages	5
DOIs	https://doi.org/10.1109/PESC.1998.703269
State	Published - 1998
Event	Proceedings of the 1998 IEEE 29th Annual Power Electronics Specialists Conference, PESC. Part 2 (of 2) - Fukuoka, Jpn Duration: 18 May 1998 → 21 May 1998

Publication series

Name	PESC Record - IEEE Annual Power Electronics Specialists Conference
Volume	2
ISSN (Print)	0275-9306

Other

Other	Proceedings of the 1998 IEEE 29th Annual Power Electronics Specialists Conference, PESC. Part 2 (of 2)
City	Fukuoka, Jpn
Period	18/05/98 → 21/05/98

Access to Document

10.1109/PESC.1998.703269

Cite this

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title = "Micro-transformer devices using thin-film electroplated deposition",

abstract = "We report our results fabricating micro-magnetic devices using our 20 μm photolithographic process. In this technique, magnetic devices in silicon ICs use magnetic thin-films deposited by electroplating. The magnetic and electrical characteristics of fabricated micro-transformers are measured and reported. Tests show proper operation over high-voltage isolation boundaries. Future uses for these devices will be in micro-power converters for mobile applications.",

author = "Ashraf Lotfi and {Van Dover}, {R. Bruce} and Lynn Schneemeyer and Michael Steigerwald",

year = "1998",

doi = "10.1109/PESC.1998.703269",

language = "English",

isbn = "0780344898",

series = "PESC Record - IEEE Annual Power Electronics Specialists Conference",

pages = "1511--1515",

editor = "Anon",

booktitle = "PESC Record - IEEE Annual Power Electronics Specialists Conference",

note = "Proceedings of the 1998 IEEE 29th Annual Power Electronics Specialists Conference, PESC. Part 2 (of 2) ; Conference date: 18-05-1998 Through 21-05-1998",

}

Lotfi, A, Van Dover, RB, Schneemeyer, L & Steigerwald, M 1998, Micro-transformer devices using thin-film electroplated deposition. in Anon (ed.), PESC Record - IEEE Annual Power Electronics Specialists Conference. PESC Record - IEEE Annual Power Electronics Specialists Conference, vol. 2, pp. 1511-1515, Proceedings of the 1998 IEEE 29th Annual Power Electronics Specialists Conference, PESC. Part 2 (of 2), Fukuoka, Jpn, 18/05/98. https://doi.org/10.1109/PESC.1998.703269

Micro-transformer devices using thin-film electroplated deposition. / Lotfi, Ashraf; Van Dover, R. Bruce; Schneemeyer, Lynn et al.
PESC Record - IEEE Annual Power Electronics Specialists Conference. ed. / Anon. 1998. p. 1511-1515 (PESC Record - IEEE Annual Power Electronics Specialists Conference; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Micro-transformer devices using thin-film electroplated deposition

AU - Lotfi, Ashraf

AU - Van Dover, R. Bruce

AU - Schneemeyer, Lynn

AU - Steigerwald, Michael

PY - 1998

Y1 - 1998

N2 - We report our results fabricating micro-magnetic devices using our 20 μm photolithographic process. In this technique, magnetic devices in silicon ICs use magnetic thin-films deposited by electroplating. The magnetic and electrical characteristics of fabricated micro-transformers are measured and reported. Tests show proper operation over high-voltage isolation boundaries. Future uses for these devices will be in micro-power converters for mobile applications.

AB - We report our results fabricating micro-magnetic devices using our 20 μm photolithographic process. In this technique, magnetic devices in silicon ICs use magnetic thin-films deposited by electroplating. The magnetic and electrical characteristics of fabricated micro-transformers are measured and reported. Tests show proper operation over high-voltage isolation boundaries. Future uses for these devices will be in micro-power converters for mobile applications.

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U2 - 10.1109/PESC.1998.703269

DO - 10.1109/PESC.1998.703269

M3 - Conference contribution

AN - SCOPUS:0031624326

SN - 0780344898

T3 - PESC Record - IEEE Annual Power Electronics Specialists Conference

SP - 1511

EP - 1515

BT - PESC Record - IEEE Annual Power Electronics Specialists Conference

A2 - Anon, null

T2 - Proceedings of the 1998 IEEE 29th Annual Power Electronics Specialists Conference, PESC. Part 2 (of 2)

Y2 - 18 May 1998 through 21 May 1998

ER -

Micro-transformer devices using thin-film electroplated deposition

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