Micro-transformer devices using thin-film electroplated deposition

Ashraf Lotfi, R. Bruce Van Dover, Lynn Schneemeyer, Michael Steigerwald

Research output: Chapter in Book/Report/Conference proceedingConference contribution

13 Citations (Scopus)

Abstract

We report our results fabricating micro-magnetic devices using our 20 μm photolithographic process. In this technique, magnetic devices in silicon ICs use magnetic thin-films deposited by electroplating. The magnetic and electrical characteristics of fabricated micro-transformers are measured and reported. Tests show proper operation over high-voltage isolation boundaries. Future uses for these devices will be in micro-power converters for mobile applications.

Original languageEnglish
Title of host publicationPESC Record - IEEE Annual Power Electronics Specialists Conference
Editors Anon
Pages1511-1515
Number of pages5
DOIs
StatePublished - 1 Jan 1998
EventProceedings of the 1998 IEEE 29th Annual Power Electronics Specialists Conference, PESC. Part 2 (of 2) - Fukuoka, Jpn
Duration: 18 May 199821 May 1998

Publication series

NamePESC Record - IEEE Annual Power Electronics Specialists Conference
Volume2
ISSN (Print)0275-9306

Other

OtherProceedings of the 1998 IEEE 29th Annual Power Electronics Specialists Conference, PESC. Part 2 (of 2)
CityFukuoka, Jpn
Period18/05/9821/05/98

Fingerprint

Magnetic Devices
Magnetic devices
Thin film devices
Transformer
transformers
Thin Films
Micromagnetics
Magnetic thin films
Power Converter
Mobile Applications
Power converters
Electroplating
thin films
Isolation
power converters
Silicon
Voltage
electroplating
high voltages
isolation

Cite this

Lotfi, A., Van Dover, R. B., Schneemeyer, L., & Steigerwald, M. (1998). Micro-transformer devices using thin-film electroplated deposition. In Anon (Ed.), PESC Record - IEEE Annual Power Electronics Specialists Conference (pp. 1511-1515). (PESC Record - IEEE Annual Power Electronics Specialists Conference; Vol. 2). https://doi.org/10.1109/PESC.1998.703269
Lotfi, Ashraf ; Van Dover, R. Bruce ; Schneemeyer, Lynn ; Steigerwald, Michael. / Micro-transformer devices using thin-film electroplated deposition. PESC Record - IEEE Annual Power Electronics Specialists Conference. editor / Anon. 1998. pp. 1511-1515 (PESC Record - IEEE Annual Power Electronics Specialists Conference).
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Lotfi, A, Van Dover, RB, Schneemeyer, L & Steigerwald, M 1998, Micro-transformer devices using thin-film electroplated deposition. in Anon (ed.), PESC Record - IEEE Annual Power Electronics Specialists Conference. PESC Record - IEEE Annual Power Electronics Specialists Conference, vol. 2, pp. 1511-1515, Proceedings of the 1998 IEEE 29th Annual Power Electronics Specialists Conference, PESC. Part 2 (of 2), Fukuoka, Jpn, 18/05/98. https://doi.org/10.1109/PESC.1998.703269

Micro-transformer devices using thin-film electroplated deposition. / Lotfi, Ashraf; Van Dover, R. Bruce; Schneemeyer, Lynn; Steigerwald, Michael.

PESC Record - IEEE Annual Power Electronics Specialists Conference. ed. / Anon. 1998. p. 1511-1515 (PESC Record - IEEE Annual Power Electronics Specialists Conference; Vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Lotfi A, Van Dover RB, Schneemeyer L, Steigerwald M. Micro-transformer devices using thin-film electroplated deposition. In Anon, editor, PESC Record - IEEE Annual Power Electronics Specialists Conference. 1998. p. 1511-1515. (PESC Record - IEEE Annual Power Electronics Specialists Conference). https://doi.org/10.1109/PESC.1998.703269